The IR-2200 is an infrared digital microscope integrated with a C-mount infrared camera for inspections in the 400nm to 2000nm range. The system allows full sophisticated measurement and image processing capabilities for detailed inspection of materials transparent to the near infrared (NIR) and shortwave infrared (SWIR) wavelengths. This allows inspection of sub-surface imaging, including MEMS device, 3D stacks, incoming wafers, photovoltaic, and wafer level CSP with outstanding precision that traditional microscopes are not able to achieve.
The system can be configured with different objectives, such as M.Plan APO objectives with sensitivity range of 400nm to 1100nm, high resolution IR objectives for near infrared wavelengths up to 1600nm, and color corrected high resolution IR objectives for 1000nm to 2000nm wavelengths. IR-2200 comes standard on a stand with coarse and fine focus adjustment, and a coarse manual XY stage. It is also equipped with Koehler illumination that includes a coaxial lighting port and IR filter insertion slot. A 4 nose manual turret is also included to allow installation of up to 4 different objectives onto the system. Highly sensitive infrared cameras with spectral range of 900 nm to 1700 nm or CMOS NIR cameras with sensitivity from 380 nm up to 1200nm can be used on the system. All cameras can be connected directly to PC via USB 2.0 output for camera control. Depending on camera model, image processing and measurement software may be included, or are available as an optional feature. For further customization of included accessories, please contact us with your application requirements.
Digital Microscope Image Capture
- Capture from a wide variety of cameras and frame grabbers.
- Control camera parameters like exposure, gain, and gamma from within the application.
- Display user configurable color mapping of up to 16-bit monochrome data.
- Capture single frames to BMP, JPEG, RAW, or TIFF.
- Capture image sequences/motion video to AVI or RAW.
- Extensive array of filter options (average, low/high pass, median, laplace, etc.)
- Built in non-uniformity correction
Image and Data Analysis
- Full image, ROI histograms and plotting capabilities.
- Optional feature segmentation using thresholding capabilities to extract blobs and other feature types.
- Data export to Microsoft Excel.
- Extensible with support for custom image acquisition drivers, image processing functions, image feature identification ,and custom charts written in C/C++, C#, or VB.NET.
IR-2200 Infrared Digital Microscope Viewing Chart
(Mobile: swipe left for horizontal scrolling)
Spectral sensitivity range from 400nm - 1100nm | ||||
M. Plan APO Objectives | 2.5X | 5X | 10X | 20X |
Working Distance | 32.0 mm | 35.1 mm | 36.9 mm | 22.0 mm |
Focal Distance | 80.0 mm | 40 mm | 20 mm | 10 mm |
NA | 0.06 | 0.15 | 0.25 | 0.4 |
Resolution | 4.6 um | 1.7 um | 1.2 um | 0.8 um |
Focal Depth | 76.4 um | 10.7 um | 4.4 um | 2.2 um |
Wavelength | 0.4 um - 1.1 um | 0.4 um - 1.1 um | 0.4 um - 1.1 um | 0.4 um - 1.1 um |
** The resolution is calculated as a theoretical resolution based on NA of wavelength 550nm. |
Spectral sensitivity range from 900nm - 2000nm | ||||||||
Objectives | 1.0X | 2.5X | 10X | 20X | 50X | 100X | 20X** | 50X** |
Working Distance | 12 mm | 28.0 mm | 30.7 mm | 12 mm | 10 mm | 10 mm | 10 mm | 10 mm |
Focal Distance | 200 mm | 80 mm | 20 mm | 10 mm | 4 mm | 2 mm | 10 mm | 4 mm |
NA | 0.03 | 0.1 | 0.27 | 0.5 | 0.6 | 0.75 | 0.6 | 0.71 |
Resolution | 18.4 um | 0.3 um | 2.5 um | 1.1 um | 0.9 um | 0.7 um | 1.5 um | 1.2 um |
Focal Depth | 611 um | 55 um | 7.5 um | 2.2 um | 1.5 um | 0.9 um | 2.15 um | 1.58 um |
Wavelength | 0.8 - 1.6 um | 0.45 - 1.6 um | 0.48 - 1.6 um | 0.8 - 1.6 um | 0.9 - 1.6 um | 0.9 - 1.6 um | 1 - 2 um | 1 - 2 um |
*The resolution is calculated as a theoretical resolution based on NA of wavelength 1100nm. ** Last 2 columns resolution is calculated as a theoretical resolution based on NA of wavelength of 1550nm. |
Technical Specifications
Illumination | Koehler Illumination |
Turret | 4 nose manual turret |
Stand | Coarse/Fine focus |
Stage | Course manual XY stage |
Camera | Highly sensitive infrared cameras or CMOS NIR cameras |
Silicon based option for NIR application (740nm – 1100 nm) |